Designing Heating Zones in a Mica Heating Plate for Better Thermal Balance

https://engineered-thermal-hub.capitaljays.com/posts/ito-glass-heater-integration-tips-for-transparent-equipment-surfaces

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry